Turbo Pump

A turbo pump is a type of pump comprising basically two main components: a pump driven by a turbine, both mounted on the same shaft. Resembling a jet engine, a turbo pump has a stack of rotors with multiple, angled blades which drive at very high tangential speed.

Types of Turbo Pump:
A turbo pump can refer to either of two types of pumps:

• Turbo molecular pumps : These pumps are used to obtain high vacuum.
  
  
• Centrifugal or axial pump : Most turbo pumps are centrifugal which means that the fluid enters the pump near the axis and the rotor accelerates the fluid circumferentially and compresses it against the rim, generating high pressures and if the outlet back pressure is not very high, high flow rates. Axial turbo pumps also exist. Here, the axle has essentially propellers attached to the shaft and the fluid is forced by these parallel with the main axis of the pump.

Uses and Features of Turbo pump:

• Turbo pumps were originally developed for fire fighting for pumping water at high rates and pressures.
  
  
• Using turbo pumps in rockets was a breakthrough.
  
  
• Steam turbine powered turbo pumps exist and are employed when there is a source of steam, like the boilers of steam ships.
  
  
• Gas turbines are used when electricity or steam is not available and place or weight restrictions permit the use of more efficient sources of mechanical energy.
  
  
• Ramjet motors are also usually fitted with turbo pumps, the turbine being driven either directly by external free stream ram air or internally by airflow diverted from combustion entry.
  
  
• Turbo molecular pumps are used in a wide variety of high vacuum applications.
  
  
• Turbo pumps find applications in processes involving:
  
  
  • Metal Etching
  • Dielectric Etching
  • Interconnect Etching
  • Ion Implantation
  • Sputtering
  • Plasma Deposition